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Custom Gas Analysis Systems
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Custom Design
Example
System System Components
Bomen WorkIR
Spectrometer
4m to 6m 4Runner
OR
9.6m Ranger-EN long
path gas cell
2,5,10,15, & 20 cm
Scout-EN short path gas cell
Sensitivity
Range
Long path gas cell:
ppm level to 10ppb
Short path gas cell: %
level to 50 ppm
Pressure Range
Atmospheric to 200 psi
Temperature Range
0°C to 300°C
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Gas Analysis Cells
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Pathfinder
0.4 - 10 meter variable pathlength
Pressurizable to 50 psig
Heatable to 200º C
Gold-coated SS mirrors
All-metal, electropolished stainless
steel
Very high energy throughput
Extremely chemically-inert
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4 Runner
0.6-liter volume gives a
surface to volume ratio of 0.09 square meter/liter
125-mm base path
304 stainless steel body for
corrosion resistance, durability, and simplified cleaning
Circumferential flow geometry
Viton®,
Teflon®-Encapsulated-Viton®, or Metal Kalrez® seals.
BaF2, CaF2 , or AR-coated
ZnSe window materials
Welded VCR fittings for gas
porting
Evacuable and pressurizable:
10-4 Torr
to 300 psig
Heatable to 260° C with
temperature controller
Integrated purge box with
movable reference optics
MgF2-protected,
gold-coated stainless steel mirrors
Insulation and cover |
Ranger
1.7-liter
volume gives a surface to volume ratio of 0.05 square meter/liter
200 mm base
path
304
stainless steel body for corrosion resistance, durability, simplified cleaning
and effective heating
Viton® or
Kalrez® seals
KBr, CaF2 ,
or AR-coated ZnSe window materials
Welded VCR
fittings for gas porting
Evacuable
and pressurizable: 10-4 Torr to 150 psig
Heatable to
260° C with temperature controller
Integrated
purge box with movable reference optics
MgF2-protected,
gold-coated stainless steel mirrors
Insulation
and cover
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Gas
Analysis Cells
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Scout
28 cm3 volume
10-cm pathlength
316 stainless steel body with nickel plating for durability,
high pressure loadings, wide chemical compatibility, simplified cleaning and
effective heating
VitonT, TeflonT-encapsulated VitonT, or KalrezT
O-rings for chemical resistance and temperature considerations
KBr, CaF2,
ZnSe, quartz, or sapphire window materials for
UV-VIS and FT-IR applications
Integral stainless steel VCR fittings
Evacuable and pressurizable: 10-4 Torr to 150 psig
Heatable to 2000 C with heating mantle, tape, or dual bands
Optional temperature controller
Easy adaptation to Mattson, Perkin-Elmer, Bio-Rad, Nicolet,
Bomem and Bruker spectrometers
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Montero
1.0 meter fixed pathlength
82.6 mm basepath
Stainless steel body
Protected gold coated stainless steel mirrors
Internal transfer optics
Low 520 ml volume
Purgeable beam conduits
VCR gas ports
Viton and Kalrez O-rings
Choice of windows
High energy throughput
Unheated and heated versions
Fits totally inside FTIR compartments
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CRV
316L SS body and center plate
Cell Finishing
Ni-Plated or Electropolished
Pathlength
Variable center plate (0.5mm-1cm)
Sensitivity Range
Pressure dependent, contact CICP
Pressure Range
150 to 2000 psi
(Contact CICP for higher pressures)
Temperature Range
0°C to 300°C
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Gas
Analysis Specialty Cells
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LASR 16
16-meter
(0.8-m basepath) "White Cell" Optical Geometry
Electropolished
316 Stainless Steel Cell Body
304
Stainless Steel Objective/Field Mirrors
Mirrors:
Gold-coated w/MgF2 Overcoat
Sapphire
Input & Output Windows
Welded
VCR Gas Fittings
KatrezT
O-Rings
Energy
Throughput >20%
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Cherokee
1.0 meter pathlength,
0.5 meter available
316L stainless steel
cell body (34-mm diameter)
High quality silica
collimating lenses (25-mm diameter)
Sapphire or quartz
windows
SMA connectors
High energy
throughput
Optimized for 200-um
core diameter (n.a.=0.22) silica fiber
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Hot One
Up to 700° C operation
Precise temp control to ±1°C
Water-cooled Al cell body
Evacuable or pressurizable
Swagelok gas flow ports
OFHC copper sample holder mounted in stainless steel
shell
Baseplate mounted
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Gas
Analysis Glass Cells
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Hawk
Path
Length 10 cm
Path
Length Steps NA
Fixed
Path Length SF
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Falcon
Path
Length 1 m - 20 m
Path
Length Steps 1 m - 2 m
Fixed
Path Length SF
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Eagle
Path
Length 0.5 m - 10.6 m
Path
Length Steps 0.5 m - 1.06 m
Fixed
Path Length SF
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Custom
Gas
Analysis Cells
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Custom Gas Cells

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FTIR
Accessories
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Research
ATR
Research grade VAOI vertical ATR (VAOI =
variable angle of incidence)
50%
Energy throughput Continuously variable angle of incidence (25° to 75°)
See-through
purge cover for ease of consistent placement of sample holder
Interchangeable
ATR crystals; ZnSe, Ge, KRS-5 crystals available with 30°, 45°, or 60°
angles of incidence
Sample
pressure controllable via optional torque hex wrench
Seals snugly in Nicolet FTIR compartments for
simple purging
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Insider
Mounts
in sample compartments
Requires
no instrument modification
Accommodates
a variety of geometries)
Usable
to 400° C
Easy alignment
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Vertex
5
- 85º angle of incidence with 1º resolution
Factory-calibrated
reference dial
Easy
user-calibration and position lock
Simultaneous
rotation of sample and mirror planes for constant pathlength
Kinematically
mounted for stability
KBr
input/output conditioning lense
50%
throughput provides excellent signal to noise resolution
Easy interface with most spectrometers |
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FTIR
Accessories
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Micro Press
Simplifies
FTIR microscopy sample preparation
Works
with all FTIR microscopes
Uses
standard windows
Eliminates
interference fringes
Enables
quantitatively accurate microscopy sampling
Unheated & heated versions
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Pacesetter
Precise
temperature control
Protect
components from overheating
Simple,
single-use programming
Easy
to read digital display
-200
to 1050º C temperature range
Automatic self-tuning
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Explorer
25º
- 85º angle of incidence
Variable
sampling of solids, liquids, pastes, and film coatings on metal surfaces
Adjustable
effective pathlength
Interchangeable
ATR crystals
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Software
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SPGAS
Gas
calibration based upon fundamental HITRAN data
Weighted
Multi-window CLS data analysis
Infinite
calibration data sets available
32
bits Architecture base on industrial standard Operating
System (Win NT)
Calculates
spectra for single homogeneous path or for multiple
layers
Includes
instrumental parameters into the calculations so the
calculated spectra match the line shape, resolution
and wavelength shift of the measure spectra.
Uses
HITRAN molecular spectroscopy databases
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SpectraStream
Early
Detection of changes in impurity concentrations (seconds)
Real
Time monitoring of process gases
Reduction
of the interfering effects of spectrometer drift
Assures
reliable and controlled etching of semiconductors wafers
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Q Max
Weighted
Multi-band Classical Least Squares concentration analysis
Deviations
from Beer's Law and non-linear corrections per band
On
screen visualization per band of residual spectrum,
weighted analysis, and concentration estimation.
Save
residual spectrum
Each
individual Quantification Set provides:
Serialization
Data
Password Protection
CRC
file modification detection
Inclusion
of reference spectral into the quantification analysis.
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Software
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Reprocessing
Tool
The tool described in this manual is the
quantification reprocessing tool. This tool is a supplemental software program
for QMax a program produced to create and adjust the SPGAS required
quantification sets.
This reprocessing tool gives the user an
opportunity to change the ideal gas parameters and then recalculate the
previously established calibration. After recalculating the calibration, the
user is provided with a new calibration based on the amended
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Script Editor
The
IRGAS multipoint gas analyzer, IRGAS-MPGA, is operated through the use of three
software programs. The first of the three is the IRGAS Script Editor; this program is
used to develop a script that will be executed by the IRGAS Hardware Control
Software. A sample script has been provided as an example of what types of
functions the script editor is capable of writing. After a script has been
produced it can be save into a file which can be opened and executed in the
IRGAS Hardware Control software.
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Hardware Controller
The
IRGAS Hardware Control software is
the second of the three programs used to run the system. In this software the
script is entered in order to run the remote manifold valves and other
components in the system such as the Venturi cooler. It is not necessary to
create a new script every time that the system is going to be operated;
preexisting scripts can be used. The combination of the script editor and the
hardware control allows the system to be automated.
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